FBG hardware, wafers, probes, and AI software for smart manufacturing
Zion Photonics' products combine high-performance interrogators, embedded sensor wafers, custom probes, data analytics, and web-based user interfaces for fab-ready deployment.
Dense optical sensing with lower complexity
Multipoint FBG Sensing
Up to 100 sensing points on a single optical fiber with high wavelength accuracy and resolution.
Harsh Environment Immunity
Passive optical sensing with no electrical power at the sensor and immunity to RF, microwave, plasma, EMI, and electrostatic interference.
AI-Driven Analytics
Embedded machine learning supports fault detection, chamber matching, predictive maintenance, and fab-level analytics.
Products
FBG Interrogator
High-channel-count optical interrogation platform for dense multipoint semiconductor equipment monitoring.
- 4 to 16 channels
- Up to 100 sensors per channel
- ±1 pm accuracy / stability
- 0.5 pm resolution
- Self-calibrating internal wavelength reference
- 100 Hz data output per channel
- 1 Gbps Ethernet communication
- Embedded analytics and web UI
FBG Temperature Monitor Wafer
Embedded sensing wafer for chamber thermal mapping, ESC/pedestal analysis, and wafer-level process diagnostics.
- 200 mm or 300 mm silicon monitor wafer
- 750 µm wafer thickness
- 1 to 100 embedded FBG sensing points
- −20°C to 300°C temperature range
- ±1°C typical accuracy
- 0.1°C resolution
- Vacuum-compatible feedthrough options
- Proprietary strain-decoupled sensor attachment
FBG Temperature Probe
Rugged fiber optic probes for in-situ, long-term deployment in solids, liquids, gases, and semiconductor process hardware.
- 1 to 50 gratings per probe
- −20°C to 650°C temperature range
- ±1°C or better accuracy
- Stainless steel, PEEK, or ceramic protective tube
- Solid, liquid, or gas temperature measurement
- Suitable for long-term deployment
| Product | Best Use | Primary Value |
|---|---|---|
| ICM-1000 Interrogator | Tool cluster, chamber, and multi-fiber monitoring | High-density data acquisition and AI-ready output |
| ICMW-100 Monitor Wafer | Wafer-level thermal mapping and chamber characterization | Direct visibility into process conditions across wafer geometry |
| FTP Series Probe | Gas lines, process fixtures, solids, liquids, and long-term monitoring | Rugged, EMI-immune temperature monitoring |