Integrated multipoint sensing for semiconductor manufacturing
Zion Photonics develops Fiber Bragg Grating sensing systems and embedded AI analytics for real-time equipment condition monitoring, chamber matching, predictive maintenance, and process control.
Real-time multipoint monitoring
Chamber / ESC / Edge Ring / Gas Line
100-point fiber sensing + AI analytics
Turn semiconductor equipment into a smart sensing network
Zion Photonics captures real-time multipoint data from chamber lids, ESCs, edge rings, gas lines, and other critical equipment. The data is analyzed by embedded AI to support automated fault detection, process control, and smart manufacturing workflows.
Multipoint FBG sensing
Up to 100 sensing points on a single optical fiber for dense temperature, strain, vibration, and acoustic visibility.
Embedded AI analytics
Transforms time-series sensor signals into equipment fingerprints, drift detection, predictive maintenance, and chamber matching insights.
Plasma-ready performance
Passive optical sensors are immune to RF and microwave electromagnetic interference where electrical sensors degrade.
Designed for advanced-node manufacturing economics
Yield
Improve uniformity and reduce process variation through better equipment visibility.
Uptime
Detect drift and abnormal conditions before tool downtime or wafer loss.
Cost
Reduce complexity versus large conventional wired sensor arrays.
Speed
Accelerate engineering decisions through web-based monitoring and trend analysis.
Discuss your chamber monitoring challenge
Explore how Zion Photonics' FBG-AI platform can be configured for your equipment, process, or fab-level monitoring workflow.
Contact Zion Photonics