Semiconductor process equipment monitoring and beyond
Zion Photonics' fiber optic acoustic emission and FBG platform addresses high-value monitoring problems where passive, EMI-immune, multipoint sensing creates a decisive advantage.
Critical chamber monitoring use cases
A single ICM-1000 interrogator with 16 channels can monitor over 1,000 sensing points across a multi-chamber tool cluster.
Power utilities
Arc detection, transformer monitoring, and overhead wire flapping detection in high-voltage environments. Fiber optic sensing is attractive in utility infrastructure because conventional electrical sensors can become unreliable under strong electromagnetic interference, and electrically conductive sensing approaches may introduce safety, grounding, or isolation challenges in high-voltage environments.
Chamber lids & showerheads
Monitor temperature and strain to reduce cracking risk as RF power increases.
ESC & pedestal uniformity
Measure 50–100 radial and azimuthal points to support CD uniformity improvement.
Edge ring / focus ring
Track wafer-edge thermal conditions for better edge process control.
Precursor & exhaust lines
Monitor temperature along full piping runs from a single fiber path.
Chamber walls
Track conditions related to plasma chemistry control and flaking prediction.
Tool clusters
Apply chamber-to-chamber matching and abnormal equipment fingerprint detection.
High-value sensing beyond fabs
Structural health monitoring
Acoustic emission, strain, and crack monitoring for bridges, aerospace structures, marine assets, and composite systems.
Oil & gas pipelines
Leak detection for gas and liquid lines using fiber deployed over long distances without electrical power at the sensor.
Aerospace
Corrosion, crack, airframe, rotor blade, and composite pressure vessel monitoring.
Medical
Small, biocompatible optical fibers for minimally invasive sensing, stress, flow, and diagnostic instrumentation.
EV charging & hydrogen refueling
Charging/refueling system health monitoring, pre-charge fingerprinting, power quality assessment, and service history capture.
Fiber Optic Acoustic Emission platform
Zion Photonics' FOAE platform combines multiparameter, multiplexed measurements of acoustic signals, strain, pressure, and temperature over long distances on a single fiber strand.